椭圆偏振光谱法教学中的解谱建模渗透

大学物理 ›› 2010, Vol. 29 ›› Issue (6): 33-33.

椭圆偏振光谱法教学中的解谱建模渗透

曹春斌[1,2,3] 孙兆奇[2,3] 宋学萍[2]

[1]安徽农业大学理学院,安徽合肥230036 [2]安徽大学物理与材料科学学院,安徽合肥230039 [3]光电信息获取与控制教育部重点实验室,安徽合肥230039

出版日期:2010-06-25 发布日期:2010-06-20

Modeling involvement in teaching process of spectroscopic ellipsometry

Online:2010-06-25 Published:2010-06-20

摘要/Abstract

摘要： 利用椭偏光谱技术可以快速准确地获得薄膜的厚度、光学常数等信息，在材料学本科及研究生相关专业的教学中占有重要地位．但教学中大多注重理论原理分析，而对于椭偏解谱建模较少涉及．本文较全面地介绍了解谱中常用的各种模型并详细阐述了各自的适用范围，进一步通过应用实例系统研究了椭偏解谱建模的方法和技巧．

关键词: 椭偏光谱技术, 解谱建模, 高校物理教学

Abstract: The thickhess and optical constants of the films can be obtained accurately and quickly by spectroscopic ellipsometry,and it is very important in the college physics teaching. But the emphasis is mainly on the theory analysis. In this paper, many useful models are introduced and their applicable area is also presented in detail. Furthermore,the technical skills are discussed by means of several examples.

Key words: spectroscopic ellipsometry, modeling in ellipsometric fitting, college physics teaching

中图分类号:

O433.4

曹春斌[;] 孙兆奇[;] 宋学萍[]. 椭圆偏振光谱法教学中的解谱建模渗透[J]. 大学物理, 2010, 29(6): 33-33.