关键词: 磁控溅射, 生长温度, YIG

Abstract: Crystal structure is a key teaching point in the solid state physics course, and growth temperature plays a crucial role in the crystal fabrication process, determining the quality of crystals. During teaching, students often struggle to understand the relationship between the microscopic structure of crystals and their macroscopic properties. This paper prepared a series of Y3Fe5O12 (YIG) films at different growth temperatures using magnetron sputtering, systematically studying their crystal structure and magnetic properties. Experimental results show that YIG can crystallize to form single-crystal films above 150 ℃, with films grown at 200 ℃ exhibiting the smallest damping factor (0.8 × 10-3). This work not only provides a reference for YIG preparation but also consolidates students understanding of crystal structure concepts and deepens their comprehension of explaining macroscopic physical properties from a microscopic perspective.

Key words: magnetron sputtering, growth temperature, YIG