为揭示 ITO 薄膜膜厚对透光率及色泽感影响规律，本文采用 TFCalc 光学薄膜设计软件计算了 50 ～ 700 nm 膜厚的 ITO 薄膜可见光透光率，平均透光率和人眼最为敏感波长550 nm 的透光率与膜厚的关系.采用膜层干涉理论研究了 ITO 膜厚和入射角对其透光率和色泽感影响规律和物理机制.研究结果表明: 对特定膜厚的 ITO薄膜，其可见光随膜厚增加会出现系列透射峰，膜厚越大，对应透射峰也相应增加.ITO 薄膜可见光透光率，平均透光率和特定波长 550 nm 的可见光透光率随膜厚的增加呈锯齿状; 随膜厚增加，ITO 薄膜的颜色呈现黄绿色、橙色、紫红色、青色、黄绿色周期性的变化.当 ITO 膜厚为 300 nm，入射角从 30°增加到 60°时，薄膜色泽从暗紫色变为亮紫色.通过本论文的研究，建立了 ITO 薄膜和膜厚关系的色卡，这对工业控制及改善 ITO 薄膜的色泽提供技术支撑.

In order to reveal the influence of ITO film thickness on optical transmittance

and colouration，the visible transmittance， average transmittance and the transmittance

at 550 nm ( the human eyes sensitive wavelength) were calculated by mean of

TFCalc optical film design software. The influence of thickness and incident angle on the

transmittance and colouration of ITO films was investigated by the theory of film interference. The

results suggested that a series of transmission peaks appear with increasing the ITO film

thickness. With the in- crease of the film thickness，the optical transmittance of ITO films is

serrated as well as the average transmittance and transmittance at 550 nm. Accordingly，the

colouration of ITO film changes periodically. When the incident an- gle increases from 30 to 60

degree，the colouration of the ITO films with thickness of 300 nm changes from dark

purple to bright purple. The color chart of ITO films was established in this paper，which provides

technical support for industrial control and improvement of colouration of ITO films.