本文采用钨针尖场电离发射源、微通道板、荧光屏、高压电源及超高真空腔体等搭建了一套场离子显微镜.通过实验装置的搭建和操作流程的详细说明，指导学生完成针尖制备与处理、场离子成像、液氮降温等实验环节.实验结果表明，通过液氮降温处理，FIM的分辨率得到显著提升，为原子级成像及制造提供了清晰度更高的图像.

Tungsten tip electron source, microchannel plate, phosphor screen, high voltage source, and Ultra High Vacuum Chamber are used to build up the Field Ion Microscope in this paper. By setting up the system and detailed describing the operating process, guide students to complete experimental procedures such as tip preparation and modification, field ion imaging, and liquid nitrogen cooling. The experiment shows that by liquid nitrogen cooling the resolution of FIM can be improved sufficiently which provides higher clarity images for atomic-level imaging and manufacturing.