Abstract: The fabricate photonic crystal on photosensitive material is proposed by double-beam interference.The period of the structure can be controlled by changing the angle between two beams.The one-dimensional grating structure and two-dimensional photonic crystals with square lattice and triangular lattice should be obtained by changing the time of exposure and the angle between the interference fringe of two exposures.

Key words: double-beam interference, interference lithography, fabrication of photonic crystal