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2017 , Vol. 36 >Issue 6: 78 - 81

DOI: https://doi.org/10.16854 /j.cnki.1000-0712.2017.06.019

Preparation and detection of an ohmic contact electrode material Ag /Codoped amorphous carbon film for semi-insulated GaAs 　　

  • DU Wei-jia1 ,
  • ZHAI Zhang-yin1 ,
  • JI Shuai ,
  • ZANG Ting-yu
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Received date: 2016-11-07

  Revised date: 2016-12-30

  Online published: 2017-06-20

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Abstract

Stable ohmic contacts play the important role in the normal operation of semiconductor devices. At present，Au /AuGeNi alloy is used as the electrode material of n type GaAs. The process is complex and the cost is high.In this paper，a new type of ohmic contact electrode material Ag /Co doped amorphous carbon film for semi-insulated GaAs and its preparation process are introduced to make it easy for readers to understand the process and technology of semiconductor devices.

Key words： semi-insulated GaAs; ohmic contact; photoconductivity

Cite this article

DU Wei-jia1 , ZHAI Zhang-yin1 , JI Shuai , ZANG Ting-yu . Preparation and detection of an ohmic contact electrode material Ag /Codoped amorphous carbon film for semi-insulated GaAs 　　[J]. College Physics, 2017 , 36(6) : 78 -81 . DOI: 10.16854 /j.cnki.1000-0712.2017.06.019

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