With the rapid development of materials science, surface science and nanoscience, people’s understanding of materials has been indepth to the atomic level, and a series of atomic level testing and characterization methods have been developed, among which ultrahigh vacuum scanning tunneling microscope (UHVSTM) is a typical representative. Although more and more UHVSTM has entered the domestic universities and scientific research institutions, it is rarely applied to the teaching practice of undergraduate and graduate students because of its valuable value, especially the complex structure of ultrahigh vacuum system. Taking UHVSTM as an example, this paper discusses the necessity of UHVSTM teaching for graduate students from the perspective of the structural design and system maintenance of ultrahigh vacuum system, and initially puts forward specific teaching content design, including the introduction of the latest scientific research results in class and the structural design and system maintenance of ultrahigh vacuum system. It is possible to give full play to the application of UHVSTM in postgraduate teaching.