椭偏测厚仪确定薄膜真实厚度的分析

大学物理 ›› 2008, Vol. 27 ›› Issue (1): 56-56.

椭偏测厚仪确定薄膜真实厚度的分析

张俊莲黄佐华朱映彬

华南师范大学物理与电信工程学院,广东广州510006

出版日期:2008-01-20 发布日期:2008-01-20

The analyses of confirming the film thickness by the ellipsometer

Online:2008-01-20 Published:2008-01-20

摘要/Abstract

摘要： 用椭偏测厚仪可以测量薄膜一个周期内的厚度和折射率．本文从理论上分析了采用变人射角确定薄膜的真实厚度时，存在最大可测厚度周期数和最大可测薄膜真实厚度，同时用图形形象描述了周期数、厚度周期、一个周期内的厚度、真实厚度之间的关系及它们与人射角的关系．

关键词: 椭偏测厚仪, 真实厚度, 最大可测周期数, 图形表示

Abstract: The ellipsometer can measure the film thickness in a period and its refractive index. The article investigates that the farthest fathomable periodicities and the farthest film real thickness are existent when the variable incident angles are used to confirm the film real thickness. The graphics mode is proposed to describe the connection between the periodicities, the period, the film thickness in a period and the incident angle.

Key words: ellipsometer, film real thickness, farthest fathomable periodicity, graphics mode

中图分类号:

O436.1

张俊莲黄佐华朱映彬. 椭偏测厚仪确定薄膜真实厚度的分析[J]. 大学物理, 2008, 27(1): 56-56.