Abstract: Metal/semiconductor Fex （In2O3）1-x granular films are prepared by RF sputtering method. The microstructure and magnetic properties are studied. The experiment results showed that the nanometer-sized Fe particles uniformly dispersed in the amorphous In2O3. At room temperature, the film shows superparamagnetic behavior, following the Langevin equation.

Key words: microstructure, grain size, superparamagnetism