Abstract: Multi-functional microwave plasma teaching and investigative device are developed for the colossal distance between teaching investigation and application of plasma technology. The frequency 2.45 GHz microwave incentive rarefied gas discharge is used to form axisymmetric plasma. Plasma without the internal electrode can a- void discharge pollution. Microwave, vacuum and cooling technologies have been integrated in the device, so it is stability and cost-effective. The equipment has been used for the experiments of diamond films deposition and plas- ma diagnosis, and the results are very well.

Key words: microwave plasma, diamond films deposition, plasma diagnosis