Abstract: The thickhess and optical constants of the films can be obtained accurately and quickly by spectroscopic ellipsometry,and it is very important in the college physics teaching. But the emphasis is mainly on the theory analysis. In this paper, many useful models are introduced and their applicable area is also presented in detail. Furthermore,the technical skills are discussed by means of several examples.

Key words: spectroscopic ellipsometry, modeling in ellipsometric fitting, college physics teaching