Abstract: The model of amplitude modulation atomic force microscope（AM-AFM） probe dynamic process is obtained by the Euler-Bernoulli equation.Based on AM-AFM＇s negative feedback control system with a PID controller,a simulation platform for AM-AFM is established.The simulation results show that the platform can accurately reflect the dynamic characteristic when the probe approaches and scans the sample.In consequence,for students doing the AM-AFM experiment,the platform can be used as an effective tool,which helps the students to have a deeper understanding on the AM-AFM,as well as a tentative experience before practice.

Key words: amplitude modulation atomic force microscope, AM-AFM simulation platform, Euler-Bernoulli equation, PID control