Abstract: With the Preisach hysteresis model of piezoelectric ceramics, which is based on the biuadratic Lagrange interpolation method, added in ,the atomic force microscope （AFM） simulation platform can simulate the scanning image distortion caused by the hysteresis effect in any voltage, and demonstrate the real scanning process of AFM more accurately for students in the experiments. To correct the distortion of the scanning images, the searching inversion algorithm is proposed to achieve the precise inverse Preisach model, and the corresponding input voltage is set to offset nonlinearity of the hysteresis effect, the simulation results show these methods effectively correct image distortion.

Key words: hysteresis, Preisaeh model, bi-quadratic Lagrange interpolation, AFM, searching inversion algorithm