Abstract: Reflection High Energy Electron Diffraction (RHEED) is extensively utilized for characterizing crystal structures. Compared to X-ray diffraction, RHEED offers the advantages of simplicity in operation and strong diffraction signals, holding great potential for applications in university physics and solid-state physics education. However, the lack of mature and intuitive simulation methods for RHEED patterns has hindered its broader adoption in educational settings. This article begins with the free-electron plane wave model to discuss the theoretical model of RHEED and extends it to the case of finite-sized crystals, providing detailed mathematical exposition. The results of this model fit well with relevant experiments, demonstrating its effectiveness and promoting the application of RHEED in related teaching fields.

Key words: reflective high-energy electron diffraction, crystal diffraction, surface physics, numerical simulation